MEMS — 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems
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San Francisco, CA, United States
26/01/2014 - 30/09/2014
The major areas of activity in the MEMS research solicited and expected at this conference include but are not limited to:
- Design, simulation and analysis tools with experimental verification
- Fabrication technologies and processes
- Silicon and non-silicon materials
- Electro-mechanical integration techniques
- Assembly and packaging approaches
- Metrology and operational evaluation techniques
- System architecture
- Industrial research and development
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
- Mechanical, thermal, and magnetic sensors, actuators, and systems
- Fluidic microcomponents and microsystems
- Microdevices for biomedical systems
- Micro chemical analysis systems
- Microdevices for inertial sensing
- Microdevices for wireless communication
- Microdevices for energy harvesting
- Optomechanical microdevices and microsystems
- Microdevices for data storage
- Nano-electro-mechanical devices and systems
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